Actinix has designed and built custom lasers and diagnostic tools for a variety of photonics applications:
Below are some examples of systems we have developed (click on photos for more info).
The system shown to the right is a custom built VUV laser source that provided over 2 mJ at 188 nm. Using a fiber laser seed source, a pulsed Nd:Yag laser, an optical parametric amplifier and non-linear DUV/VUV generation crystals the system provided high energy, low jitter, one-nanosecond light pulses.
Actinix has designed and constructed solid-state 193 nm laser systems for semiconductor metrology applications. This work was funded in part with an SBIR from the National Science Foundation.
A photomask phase metroiogy tool was developed for the semiconductor industry under an NSF Phase II grant. The system consisted of our 193-nm solid state laser in conjunction with a custom DUV microscope.
