The Model 3193 is 5 kilohertz, solid-state 193 nm light source available in either a 5 mW configuration for metrology and microscopy applications or in a 25 mW version for lithography testing. The system uses a proven, efficient far-UV light generation method that provides reliable, stable, hands-free operation for extended periods of use.

Package

Beam Quality

System Architecture

• Rep rate: 5 KHz

• Energy: 1 or 5 microjoules

• Pulse duration: 8-10 ns

• Average Power: 5 or 25 mW

• Bandwidth: 7-10 pm

• Beam diameter: < 1 mm

• Energy stability: < 10%

• Beam Quality: M² < 1.2

• Size (LxWxH): 36"x24"x8"

Model 3193A - 5 mW

Model 3193B - 25 mW

Description:

Light at 193.4 nm is generated by frequency-mixing a 266-nm ultraviolet (UV) beam with a 708-nm infra-red (IR) beam. Each of the interacting beams is generated from a common green pump laser, a JDSU Q-201 diode-pumped, intracavity-doubled Nd:YAG laser operating at 5 kHz. This laser generates 15-ns-wide (FWHM) pulses with energy up to 2.5-mJ/pulse at 532 nm, giving an average power of ~ 12.5 W. The UV beam at 266 nm is the second-harmonic of the pump laser light and is generated by Type-1 phase matching in a CLBO crystal. The IR beam at 708.6-nm is the signal wave of a 532-nm-pumped OPO. The IR and UV beams, each with power levels ~1 W, are combined using beam combiner. The flux-grown BBO crystal is uncoated and contained in a dry atmosphere within a sealed housing. A TEC is used to cool the crystal. The 193-nm light is separated from the other wavelengths by use of a Pellin-Broca prism. The 193-nm beam generated is nearly diffraction-limited (M2 values < 1.2 in both directions) with a TEM00 spatial mode.

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