Actinix is a research and development company specializing in solid-state laser systems that primarily operate in the far-UV (below 200 nm) and in optical tools for nano-scale semiconductor processing. Actinix has been developing solid-state far-UV lasers since 1999. Our first product was a 10-Hz solid-state 193-nm laser that was eventually incorporated into a commercial sampling system for mass spectroscopy applications. In 2001 we received a contract from International Sematech to build a high-resolution actinic 193 nm microscope and photomask metrology tool. That development led eventually to NSF Phase I and Phase II SBIR awards to develop a more sophisticated 193 nm laser and a microscope for measuring the OPD of advanced alternating-aperture phase-shifting photomasks. In 2007 we completed a joint development with IBM in which our 5 kHz 193 nm laser light source was used on IBM’s immersion interference lithography tool (NEMO). One of our current R&D projects is the development a long coherence length, sub-200 nm laser which will enable full-field interference immersion lithography for the manufacture of advanced integrated circuits; this effort is supported through a DARPA STTR contract.

Actinix has also been working with technology partners on the commercialization of promising new microscopy techniques for deep tissue cellular imaging and non-invasive cellular analysis. To address this important market we recently spun out CytoRay, a new start-up company. As a strategic partner CytoRay will employ Actinix laser technology in its new optical systems for cellular imaging and analysis.

Customer Service
We are happy to discuss your technology needs. Please email us at info@actinix.com, or call (831) 440-9388.

1800 Green Hills Road, Suite 105, Scotts Valley, CA 95066

News and Events

Apr /13/2010
Actinix is awarded a DARPA Phase II STTR contract to provide a next generation light source for interference immersion lithography. The project entitled "Long Coherence Length, Far Ultraviolet Laser for High-Resolution Nano-Fabrication" will involve the development of advanced fiber lasers and non-linear optics.

Mar /22/2010
Actinix spins out new biotech start-up, CytoRay, to develop and market advanced cellular imaging and analysis tools.

(c).2009.Actinix.

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