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Company
Actinix is a research and development company
specializing in solid-state laser systems that primarily
operate in the far-UV (below 200 nm) and in optical tools for nano-scale
semiconductor processing. Actinix has been developing solid-state far-UV lasers
since 1999. Our first product was a 10-Hz solid-state
193-nm
laser
that was eventually incorporated into a commercial
sampling system for mass spectroscopy applications. In 2001 we
received a contract from International Sematech to build
a high-resolution actinic 193 nm microscope and photomask
metrology tool. That
development led eventually to NSF Phase I and Phase II SBIR awards to develop a more sophisticated 193 nm laser
and a microscope for measuring the OPD of
advanced alternating-aperture phase-shifting photomasks. In 2007 we
completed a joint development with IBM in which our 5
kHz 193 nm laser light source was used on
IBM’s immersion interference lithography tool (NEMO).
One of our current R&D projects is the
development a long coherence length, sub-200 nm laser
which will enable full-field interference immersion lithography for
the manufacture of advanced integrated circuits; this
effort is supported through a DARPA STTR contract.
Actinix has also been working with technology partners on the commercialization
of promising new microscopy techniques for deep tissue
cellular imaging and non-invasive cellular analysis. To
address this important market we recently spun out CytoRay, a new start-up
company. As a strategic partner CytoRay will employ Actinix laser technology
in its new optical systems for cellular imaging and
analysis.
Customer Service
We are happy to discuss your technology needs. Please email us at
info@actinix.com, or call (831) 440-9388.
1800 Green Hills Road, Suite 105, Scotts Valley, CA
95066
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